Description
Product Model:
SFT180D Vibration Damping
SFT130D Vibration Damping
SFT100F Vibration Damping
SFT080D Vibration Damping
SFT060D Vibration Damping
SFT040D Vibration Damping
Introduction:
The SFT series of shock-resistant active vibration isolators use pneumatic isolators as the main support in the vertical direction. In the horizontal direction, they employ a mechanical inverted pendulum negative stiffness mechanism in parallel with a positive stifiness mechanism. Combined with active vibration control and precise positioning control in both the vertical and horizontal directions, the system achieves high-performance active vibration isolation and stabilization across six degrees of freedom. This design meets the high-performance vibration isolation and shock resistance stability requirements for a wide range of equipment used in back-end packaging, semiconductor inspection and metrology applications.
Features:
● Pneumatic Air Sping as Main Support
● Active Vibration Control and Precision Positioning Control
● High-Performance Vibration lsolation and Impact Resistance
● Mechanical Inverted Pendulum Negative Stiffness Mechanism in Parallel with Positive Stiffness
● Meets High-Performance Vibration lsolation and Shock Resistance Stability Requirements
● Application Fields: Back-End Packaging. Semiconductor inspection, Metrology, Etc
Specifications:
|
Model |
SFT180D |
SFT130D |
SFT100F |
|
Max Load Capacity With 4 Isolators |
4500~7200 kg |
3500~5200 kg |
2500~4000kg |
|
Isolator Dimensions |
380*370*260（L*W*H mm） |
290*290*259（L*W*H mm） |
260*260*259（L*W*H mm） |
|
Isolator Weight |
≤86kg |
≤67kg |
≤45kg |
|
Transmissibility |
≤-3dB@2Hz，≤-12B@5Hz，≤-25dB@10Hz |
≤-3dB@2Hz，≤-12B@5Hz，≤-25dB@10Hz |
≤-12dB@1Hz，≤-15dB@5Hz，≤-25dB@10Hz |
|
Horizontal Actuator Force per Isolator |
640N |
640N |
320N |
|
Max System Power |
1500W |
1500W |
700W |
|
Vertical Actuator Force per Isolator |
320N |
||
|
Passive Element |
Pneumatic Air Sping |
||
|
Degrees of Freedom |
6 |
||
|
Active Isolation Range |
0.8 ~ 150Hz |
||
|
Position Stability |
≤±8μm |
||
|
Model |
SFT080D |
SFT060D |
SFT040D |
|
Max Load Capacity With 4 Isolators |
2400~3200 kg |
1600~2400 kg |
1000~1600 kg |
|
Isolator Dimensions |
308*300*202（L*W*H mm） |
308*300*202（L*W*H mm） |
308*300*202（L*W*H mm） |
|
Isolator Weight |
≤49kg |
≤49kg |
≤47kg |
|
Passive Element |
Pneumatic Air Sping |
||
|
Degrees of Freedom |
6 |
||
|
Active Isolation Range |
0.8 ~ 150Hz |
||
|
Transmissibility |
≤-3dB@2Hz，≤-12B@5Hz，≤-25dB@10Hz |
||
|
Position Stability |
≤±8μm |
||
|
Horizontal Actuator Force per Isolator |
640N |
||
|
Vertical Actuator Force per Isolator |
320N |
||
|
Max System Power |
1500W |
||
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