Description
1. Design and material selection
(1) Material selection: highly corrosion-resistant and high-temperature-resistant stainless steel (304L or 316L) and titanium (Gr2); high-temperature-resistant (≥200°C) and low-gassing rate sealing materials, such as fluororubber, etc.
(2) Design: stress analysis is carried out to ensure that there is no deformation under vacuum and negative pressure conditions; vibration modal analysis is carried out to avoid fatigue cracking caused by resonance during feeding.
2. Production Process
(1)Production of the casing
I. Laser or plasma cutting to ensure no oxidation on the cut.
II. Rolling , automatic argon arc welding (TIG) welding.
III. Stainless steel solution: water quenching treatment; titanium: vacuum annealing treatment .
IV. The flange surface is finely processed by CNC lathe and the inner hole is honed.
(2) Feeding mechanism processing
I. Screw feeder: choose carbide (YG8) or titanium-plated stainless steel; CNC grinder for pitch processing .
II. Vibrating feeding plate: electromagnetic coil and spring sheet are matched and debugged.
(3) Vacuum flange and valve
I. Flange standard: CF (ConFlat), KF (Quick Flange)
II. Gate valve: Sealing surface grinding; action test.
(4) Welding and assembly
(5) Vacuum performance test
Leak test : Helium mass spectrometer leak test , pressure test .
Baking and degassing: step temperature increase; vacuum degree monitoring .
(6) Surface processing and cleaning
I. Internal surface treatment: electrolytic polishing, removal of free iron ion; passivation.
II. Cleanliness control.
3. Quality Control
(1) Select low volatility, low outgassing and pure materials .
(2) Precision processing, control key dimensional tolerances.
(3) Weld inspection: PT/MT detects surface cracks.
(4) Helium mass spectrometer is used to detect vacuum leakproofness.
(5) Weighing sensor + PLC records and detects feeding accuracy.
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